Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/05/2023
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Application #:
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17118107
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Filing Dt:
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12/10/2020
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Publication #:
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Pub Dt:
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06/17/2021
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Inventors:
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Katie Lutker-Lee, Jake Kaminsky, Yu-Hao Tsai, Angelique Raley, Mingmei Wang
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Title:
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METHODS OF PATTERNING SMALL FEATURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BLVD. |
| AUSTIN, TX 78741 |
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05/10/2024 02:25 PM
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