Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/26/2023
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Application #:
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17214707
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Filing Dt:
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03/26/2021
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Publication #:
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Pub Dt:
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09/30/2021
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Inventors:
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Sheng Guo, Steve Sansoni, Yuanhong Guo, Marek Radko, Xiaoxiong Yuan, Yuji Murayama et al
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Title:
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REMOTE PLASMA CLEANING OF CHAMBERS FOR ELECTRONICS MANUFACTURING SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATENT DOCKET ADMINISTRATOR |
| LOWENSTEIN SANDLER LLP |
| ONE LOWENSTEIN DRIVE |
| ROSELAND, NJ 07068 |
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