Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/02/2024
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Application #:
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16548845
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Filing Dt:
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08/23/2019
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Publication #:
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Pub Dt:
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02/25/2021
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Inventors:
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HUAN-CHIEH CHEN, JHIH-REN LIN, TAI-PIN LIU, SHYUE-SHIN TSAI, KEITH KUANG-KUO KOAI
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Title:
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SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN |
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| WPAT, PC INTELLECTUAL PROPERTY ATTORNEYS |
| 1100 QUAIL STREET, SUITE 202 |
| NEWPORT BEACH, CA 92660 |
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