Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2024
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Application #:
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16947422
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Filing Dt:
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07/31/2020
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Publication #:
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Pub Dt:
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02/03/2022
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Inventors:
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Chih-Lung CHENG, Sheng-chun YANG, Yi-Ming LIN, Po-Chih HUANG, Yu-Hsiang JUAN et al
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Title:
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GAS FLOW ACCELERATOR TO PREVENT BUILDUP OF PROCESSING BYPRODUCT IN A MAIN PUMPING LINE OF A SEMICONDUCTOR PROCESSING TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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8, LI-HSIN RD. 6 HSINCHU SCIENCE PARK |
HSINCHU, TAIWAN 300-78 |
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HARRITY & HARRITY, LLP |
11350 RANDOM HILLS ROAD |
SUITE 600 |
FAIRFAX, VA 22030 |
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06/04/2024 10:41 PM
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