Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/15/2024
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Application #:
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18163522
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Filing Dt:
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02/02/2023
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Publication #:
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Pub Dt:
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06/15/2023
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Inventors:
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Keren J. KANARIK, Samantha SiamHwa TAN, Yang PAN, Jeffrey MARKS
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Title:
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PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER LAW GROUP LLP |
| P.O. BOX 51887 |
| PALO ALTO, CA 94303 |
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