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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/20/1982
Application #:
06185831
Filing Dt:
09/10/1980
Inventors:
CHARLES J. HENDRICKS, WILLIAM W. HICKS, JOHN H. KELLER
Title:
MODIFIED RIE CHAMBER FOR UNIFORM SILICON ETCHING
Assignment: 1
Reel/Frame:
003801/0094Recorded: 09/10/1980Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
Exec Dt:
09/05/1980
Exec Dt:
09/05/1980
Exec Dt:
09/05/1980
Assignee:
A CORP. OF N.Y.
ARMONK, NEW YORK 10504
Correspondent:
JOHN A. JORDAN
IBM CORP., DEPT. 901
BLDG. 300-482
HOPEWELL JUNCTION, NY 12533

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