Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/24/1982
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Application #:
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06087220
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Filing Dt:
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10/22/1979
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Inventor:
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EDWARD H. PHILLIPS
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Title:
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TWO STAGE WAFER PREALIGNMENT SYSTEM FOR AN OPTICAL ALIGNMENT AND EXPOSURE MACHINE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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EATON CENTER |
CLEVELAND, OHIO 44114 |
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ROLAND I. GRIFFIN |
25487 ADOBE LANE |
LOS ALTOS HILLS, CA 94022 |
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