Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/09/1983
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Application #:
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06289199
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Filing Dt:
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08/03/1981
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Inventor:
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ISSEI IMAHASHI
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Title:
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METHOD AND APPARATUS FOR MEASURING A GAP DISTANCE BETWEEN A MASK AND A WAFER TO BE USED IN FABRICATION OF SEMICONDUCTOR INTEGRATED CIRCUITS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 2381-1, OHARA, KITAGEJYO, |
| FUJII-MACHI, NIRASAKI-SHI, A CORP.OF JAPAN |
| YAMANASHI-KEN, JAPAN |
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| PRICE, HENEVELD, HUIZENGA & COOPER |
| 5740 FOREMOST DRIVE, S.E. |
| P.O. BOX 2567 |
| GRAND RAPIDS, MI 49501 |
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