Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/20/1983
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Application #:
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06246368
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Filing Dt:
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03/23/1981
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Inventors:
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TSUTOMU TSUKADA, KATSUMI UKAI
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Title:
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SPECTRAL MONITORING DEVICE FOR BOTH PLASMA ETCHING AND SPUTTERING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 8-1, YOTSUYA 5-CHOME, FUCHU-SHI |
| TOKYO 183, JAPAN |
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| LAFF, WHITESEL & ROCKMAN |
| JOHN HANCOCK CENTER |
| CHICAGO, IL 60611 |
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