Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/27/1983
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Application #:
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06382050
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Filing Dt:
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05/25/1982
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Inventor:
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CHRISTOPHER M. HORWITZ
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Title:
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PROCESS FOR SELECTIVELY ETCHING SILICON
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 77 MASSACHUSETTS AVE. |
| CAMBRIDGE, MASSACHUSETTS 02139 |
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| ARTHUR A. SMITH, JR. |
| MASSACHUSETTS INST. OF TECHNOLOGY |
| CAMBRIDGE, MA 02139 |
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