Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/14/1984
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Application #:
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06396123
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Filing Dt:
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07/07/1982
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Inventors:
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HARUO OKANO, YASUHIRO HORIIKE
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Title:
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RIE APPARATUS UTILIZING AN SHIELDED MAGNETRON TO ENHANCE ETCHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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SCHUYLER, BANNER, BIRCH, MC KIE & |
BECKETT |
1000 CONNECTICUT AVE. |
WASHINGTON, DC 20036 |
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