Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/06/1984
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Application #:
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06459745
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Filing Dt:
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01/21/1983
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Inventor:
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RICHARD S. MUKA
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Title:
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HEATER ASSEMBLY FOR THERMAL PROCESSING OF A SEMICONDUCTOR WAFER IN A VACUUM CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| A CORP. OF DE |
| PALO ALTO, CALIFORNIA |
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| WILLIAM R. MCCLELLAN |
| VARIAN ASSOCIATES/ PATENT DEPT. |
| 8 SALEM ROAD |
| BEVERLY, MA 01915 |
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Assignment:
2
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SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
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| SIDLEY & AUSTIN |
| ONE FIRST NATIONAL PLAZA |
| CHICAGO, IL 60603 |
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