Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/15/1985
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Application #:
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06575611
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Filing Dt:
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01/31/1984
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Inventors:
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LEE CHEN, HENRI A. KHOURY, HARLAN R. SEYMOUR
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Title:
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OPTICAL EMISSION SPECTROSCOPY END POINT DETECTION IN PLASMA ETCHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| A CORP. OF NEW YORK |
| ARMONK, NEW YORK 10504 |
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| JOSEPH F. VILLELLA |
| IBM CORPORATION, PATENT OPERATIONS |
| 1755 SO. JEFF. DAVIS HWY., #605 |
| ARLINGTON, VA 22202 |
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