Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/02/1985
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Application #:
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06535902
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Filing Dt:
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09/26/1983
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Inventors:
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THEODORE D. MOUSTAKAS, H. PAUL MARUSKA
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Title:
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METHOD FOR SPUTTERING A PIN MICROCRYSTALLINE/AMORPHOUS SILICON SEMICONDUCTOR DEVICE WITH THE P AND N-LAYERS SPUTTERED FROM BORON AND PHOSPHOROUS HEAVILY DOPED TARGETS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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EXXON RESEARCH AND ENGINEERING CO. |
P. O. BOX 390 |
FLORHAM PARK, NJ 07932 |
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