Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/1985
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Application #:
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06530044
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Filing Dt:
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09/07/1983
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Inventors:
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ASAHIRO KUNI, TOSHIMITSU HAMADA, HIROSHI MAKIHIRA, KAZUSHI YOSHIMURA
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Title:
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METHOD AND APPARATUS FOR DETECTING EDGE OF FINE PATTERN ON SPECIMEN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
| A CORP OF JAPAN |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY & WANDS |
| SUITE 600 |
| 1919 PENNSYLVANIA AVENUE, N. W. |
| WASHINGTON, DC 20006 |
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