Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/01/1986
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Application #:
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06618592
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Filing Dt:
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06/08/1984
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Inventors:
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L. RAFAEL REIF, THOMAS J. DONAHUE, WAYNE R. BURGER
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Title:
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GROWTH OF EPITAXIAL FILMS BY CHEMICAL VAPOR DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| ARTHUR A. SMITH, JR. |
| ROOM E19-722 |
| MASSACHUSETTS INSTITUTE OF TECH. |
| CAMBRIDGE, MA 02139 |
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