Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/29/1986
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Application #:
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06626496
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Filing Dt:
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06/29/1984
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Inventors:
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BURN J. LIN, YUAN TAUR
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Title:
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SYSTEM FOR REAL-TIME MONITORING THE CHARACTERISTICS, VARIATIONS AND ALIGNMENT ERRORS OF LITHOGRAPHY STRUCTURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| A CORP. OF NY |
| ARMONK, NEW YORK 10504 |
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| JOHN J. GOODWIN |
| IBM PATS., OPER., P. O. BOX 218 |
| YORKTOWN HEIGHTS, NY 10598 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 805 ESTELLE DR., STE. 110 |
| LANCASTER, PENNSYLVANIA 17601 |
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| CUSHMAN, DARBY & CUSHMAN |
| ELEVENTH FLR.,1615 L ST., N.W. |
| WASHINGTON, D.C. 20036-5601 |
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