Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/09/1987
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Application #:
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06791861
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Filing Dt:
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10/28/1985
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Inventors:
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KLAUS D. BEYER, JAMES S. MAKRIS, ERIC MENDEL, KAREN A. NUMMY, SEIKI OGURA, JACOB RISEMAN et al
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Title:
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METHOD FOR REMOVING PROTUBERANCES AT THE SURFACE OF A SEMICONDUCTOR WAFER USING A CHEM-MECH POLISHING TECHNIQUE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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ROBERT J. HAASE |
IBM CORP., DEPT. 901/BLDG. 300-482 |
HOPEWELL JUNCTION, NY 12533-9988 |
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