Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/20/1987
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Application #:
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06762329
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Filing Dt:
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08/05/1985
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Inventors:
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YOSHITADA OSHIDA, MASATAKA SHIBA, NAOTO NAKASHIMA, TOSHIHIKO NAKATA, SACHIO UTO
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Title:
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SEMICONDUCTOR EXPOSURE APPARATUS AND ALIGNMENT METHOD THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY & WANDS |
| STE. 600, 1919 PENN., AVE., N. W. |
| WASHINGTON, DC 20006 |
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