Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/26/1988
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Application #:
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06769505
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Filing Dt:
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08/23/1985
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Inventors:
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HIROSHI SAITO, YASUMICHI SUZUKI, SHUUZOO SAN0, TAMOTSU SHIMIZU, SUSUMU AIUCHI
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Title:
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METHOD AND APPARATUS FOR MICROWAVE ASSISTING SPUTTERING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 6, KANDA SURGADAI 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY AND WANDS |
| STE. 600 |
| 1919 PA. AVENUE, N.W. |
| WASHINGTON, DC 20006 |
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