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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/28/1989
Application #:
07123073
Filing Dt:
11/19/1987
Inventors:
SUSAN B. FELCH, RONALD A. POWELL
Title:
METHOD OF MAPPING ION IMPLANT DOSE UNIFORMITY
Assignment: 1
Reel/Frame:
004824/0842Recorded: 01/25/1988Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
Exec Dt:
11/17/1987
Exec Dt:
11/18/1987
Assignee:
PALO ALTO, CALIFORNIA 94303
Correspondent:
STANLEY Z. COLE
VARIAN ASSOCIATES, INC.
611 HANSEN WAY, M/S: E-305
PALO ALTO, CA 94303-0883

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