Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/06/1989
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Application #:
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07123640
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Filing Dt:
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11/23/1987
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Inventors:
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TIMOTHY H. DAUBENSPECK, FAITH S. ICHISHITA
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Title:
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CHLOROFLUOROCARBON ADDITIVES FOR ENHANCING ETCH RATES IN FLUORINATED HALOCARBON/OXIDANT PLASMAS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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MARK F. CHADURJIAN |
IBM CORP., |
DEPT., 915/972-2 |
1000 RIVER STREET |
ESSEX JUNCTION, VT 05452 |
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