Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/05/1989
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Application #:
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07106848
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Filing Dt:
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10/16/1987
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Inventors:
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DENNIS W. HESS, TODD A. BROOKS
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Title:
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PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF THIN FILMS OF SILICON NITRIDE FROM CYCLIC ORGANOSILICON NITROGEN PRECURSORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| PHILLIPS, MOORE, LEMPIO & FINLEY |
| 177 POST STREET, SUITE 800 |
| SAN FRANCISCO, CA 94108 |
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