Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/09/1990
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Application #:
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07173832
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Filing Dt:
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03/28/1988
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Inventor:
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PAUL J. RUDECK
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Title:
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ALIGNMENT MARK SYSTEM FOR ELECTRON BEAM/OPTICAL MIXED LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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NEIL B. SIEGEL |
SUGHRUE, MION, ZINN, MACPEAK & SEAS |
1776 K STREET, N.W. |
WASHINGTON, DC 20006-2359 |
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