Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/30/1990
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Application #:
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06882116
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Filing Dt:
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07/03/1986
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Inventors:
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SATYA N. CHAKRAVARTI, STEPHEN J. FONASH, XIAO-CHUN MU
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Title:
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POST DRY-ETCH CLEANING METHOD FOR RESTORING WAFER PROPERTIES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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WILLIAM T. ELLIS |
INTERNATIONAL BUSINESS MACHINES CORP. |
DEPT. 901 |
B/300-482 |
HOPEWELL JUNCTION, NY 12533 |
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