Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/17/1990
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Application #:
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07416337
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Filing Dt:
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10/03/1989
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Inventors:
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LARRY W. AUSTIN, HAROLD G. LINDE
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Title:
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METHOD OF ANISOTROPICALLY ETCHING SILICON WAFERS AND WAFER ETCHING SOLUTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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WILLIAM D. SABO |
IBM CORP. |
1000 RIVER RD., DEPT. 915, BLDG. 972-2 |
ESSEX JUNCTION, VT 05452 |
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