Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/23/1990
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Application #:
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07132528
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Filing Dt:
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12/14/1987
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Inventors:
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P. A. CROSSLEY, H. KEITH NISHIHARA
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Title:
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METHOD AND APPARATUS FOR MEASURING FEATURE DIMENSIONS USING CONTROLLED DARK-FIELD ILLUMINATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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ROBERT C. COLWELL |
TOWNSEND AND TOWNSEND |
STEUART ST. TOWER, ONE MARKET PLAZA |
SAN FRANCISCO, CA 94105 |
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