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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	4971651	Issue Dt:	11/20/1990	Application #:	07475266	Filing Dt:	02/05/1990
Inventors:	SEIICHI WATANABE, MAKOTO NAWATA, RYOOJI FUKUYAMA, YUTAKA KAKEHI, SABURO KANAI et al
Title:	MICROWAVE PLASMA PROCESSING METHOD AND APPARATUS

Assignment: 1

Reel/Frame:

Recorded: 06/28/1990

Pages: 2

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST.

Assignors:

Exec Dt:

01/08/1990

Exec Dt:

01/09/1990

Exec Dt:

01/08/1990

Exec Dt:

01/08/1990

Exec Dt:

01/09/1990

Exec Dt:

01/11/1990

Assignee:

6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU,

TOKYO, JAPAN

Correspondent:

ANTONELLI, TERRY & WANDS

SUITE 600

1919 PENNSYLVANIA AVE., N.W.

WASHINGTON, DC 20006

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