Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/18/1990
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Application #:
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07380026
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Filing Dt:
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07/14/1989
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Inventors:
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JIRO ARIMA, HIROJI TSUJIMURA, TOMONORI NARITA, HIROKI TAKEBUCHI
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Title:
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METHOD FOR MEASURING SURFACE TEMPERATURE OF SEMICONDUCTOR WAFER SUBSTRATE, AND HEAT-TREATING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| C/O OSAKA KOKUSAI BLDG., 3-13, 2-CHOME, AZUCHI-MACHI, CHUO-KU, OSAKA-SHI |
| OSAKA, JAPAN |
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| 1-26-2, NISHI-SHINJUKU, SHINJUKU-KU |
| TOKYO, JAPAN |
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| MARVIN J. SPIVAK |
| OBLON, SPIVAK, MCCLELLAND, |
| MAIER & NEUSTADT |
| 1755 JEFFERSON DAVIS HWY, 4TH FLOOR |
| ARLINGTON, VA 22202 |
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