Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/09/1991
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Application #:
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07406652
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Filing Dt:
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09/13/1989
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Inventors:
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HANS P. DIETRICH, HANSPETER OTT, DAVID J. WEBB
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Title:
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WAFER HOLDER METHOD AND APPARATUS IN A VACUUM DEPOSITION SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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DONALD M. BOLES |
INTERNATIONAL BUSINESS MACHINES CORP., |
DEPT. 901, B/300-482 |
HOPEWELL JUNCTION, NY 12533 |
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