Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/16/1991
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Application #:
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07416804
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Filing Dt:
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10/03/1989
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Inventors:
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CHIN-CHI TSAI, STEVEN M. GORBATKIN, LEE A. BERRY
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Title:
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PLASMA GENERATING APPARATUS FOR LARGE AREA PLASMA PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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SCARBORO & BEAR CREEK RD. |
P.O. BOX 2009, A CORP. OF DE |
OAK RIDGE, TENNESSEE 37831-8014 |
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BRUCE M. WINCHELL |
GENERAL PATENT COUNSEL |
MARTIN MARIETTA ENERGY SYSTEMS, INC. |
P.O. BOX 2009 |
OAK RIDGE, TN 37831-8218 |
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