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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/03/1991
Application #:
07568008
Filing Dt:
08/16/1990
Inventors:
RUSSELL BOWMAN, ROGER N. ANDERSON
Title:
SPOKED SUSCEPTOR SUPPORT FOR ENHANCED THERMAL UNIFORMITY OF SUSCEPTOR IN SEMICONDUCTOR WAFER PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
005420/0343Recorded: 08/16/1990Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignors:
Exec Dt:
08/15/1990
Exec Dt:
08/15/1990
Assignee:
3050 BOWERS AVENUE, A CORP. OF DE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
PATENT COUNSEL - M/S 0934
LEGAL AFAIRS DEPT.
APPLIED MATERIALS, INC.
3050 BOWERS AVE.
SANTA CLARA, CA 95054

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