Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/18/1992
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Application #:
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07512151
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Filing Dt:
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04/20/1990
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Inventors:
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HIROSHI KOJIMA, YOSHIFUMI TAHARA, IZUMI ARAI
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Title:
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PLASMA ETCHING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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A CORP. OF JAPAN |
1-26-2, NISHI-SHINJUKU, SHINJUKU-KU |
TOKYO, JAPAN |
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OBLON, SPIVAK, MCCLELLAND, |
MAIER & NEUSTADT |
4TH FL., 1755 JEFF. DAVIS HWY. |
ARLINGTON, VA 22202 |
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