Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/10/1992
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Application #:
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07313180
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Filing Dt:
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02/21/1989
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Inventors:
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SUSUMU KOMORIYA, TAKAO KAWANABE, SHINYA NAKAGAWA, TAKAYOSHI OOSAKAYA, NOBUYUKI IRIKI
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Title:
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METHOD OF MAKING SEMICONDUCTOR INTEGRATED CIRCUIT, PATTERN DETECTING METHOD, AND SYSTEM FOR SEMICONDUCTOR ALIGNMENT AND REDUCED STEPPING EXPOSURE FOR USE IN SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| ANTONELLI, TERRY, STOUT & KRAUS |
| SUITE 600 |
| 1919 PENNSYLVANIA AVENUE, N.W. |
| WASHINGTON, DC 20006 |
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