Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/13/1992
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Application #:
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07553316
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Filing Dt:
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07/17/1990
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Inventors:
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TAKAO HORIUCHI, IZUMI ARAI, YOSHIFUMI TAHARA
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Title:
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METHOD FOR COOLING A PLASMA ELECTRODE SYSTEM FOR AN ETCHING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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A CORP. OF JAPAN |
1-26-2, NISHI-SHINJUKU, SHINJUKU-KU |
TOKYO, JAPAN |
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OBLON, SPIVAK, MC CLELLAND, |
MAIER AND NEUSTADT |
FOURTH FLOOR |
1755 JEFFERSON DAVIS HWY., |
ARLINGTON, VA 22202 |
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