Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/06/1993
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Application #:
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07753189
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Filing Dt:
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08/30/1991
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Inventors:
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GEORGE G. GIFFORD, JAMES A. O'NEILL
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Title:
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INFRARED THERMOGRAPHIC METHOD AND APPRATUS FOR ETCH PROCESS MONITORING AND CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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MICHAEL E. WHITHAM |
WHITHAM & MARHOEFER |
RESTON INTERNATIONAL CTR. |
11800 SUNRISE VALLEY DR., STE. 220 |
RESTON, VA 22091 |
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