Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/27/1993
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Application #:
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07708883
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Filing Dt:
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05/30/1991
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Inventors:
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MASAHIRO KOTAKI, KATSUHIDE MANABE, MASAKI MORI, MASAFUMI HASHIMOTO
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Title:
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DRY ETCHING METHOD FOR SEMICONDUCTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 1, NAGAHATA, OCHIAI, HARUHI-CHO, NISHIKASUGAI-GUN |
| AICHI-KEN, JAPAN |
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| 41-1, AZA YOKOMICHI, OAZA NAGAKUTE, NAGAKUTE-CHO, AICHI-GUN |
| AICHI-KEN, JAPAN |
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| CUSHMAN, DARBY & CUSHMAN |
| 1615 L ST., NW, 11TH FL. |
| WASHINGTON, DC 20036-5601 |
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