Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/22/1993
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Application #:
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07748114
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Filing Dt:
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08/21/1991
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Inventors:
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GARY W. BLANCHARD, CHARLES R. BOSSI, EDWARD H. PAYNE, THOMAS W. WEEKS
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Title:
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METHOD FOR REDUCING FOREIGN MATTER ON A WAFER ETCHED IN A REACTIVE ION ETCHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| NICHOLAS MESITI |
| HESLIN & ROTHENBERG |
| 450 NEW KARNER RD. |
| P.O. BOX 12695 |
| ALBANY, NY 12212-2695 |
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