Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/29/1993
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Application #:
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07858094
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Filing Dt:
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03/26/1992
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Inventor:
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CHRIS C. YU
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Title:
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ACOUSTICAL METHOD AND SYSTEM FOR DETECTING AND CONTROLLING CHEMICAL- MECHANICAL POLISHING (CMP) DEPTHS INTO LAYERS OF CONDUCTORS, SEMICONDUCTORS, AND DIELECTRIC MATERIALS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 2805 E. COLUMBIA ROAD |
| BOISE, IDAHO 83706 |
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| WILLIAM J. BETHURUM |
| JEFFERSON PLACE, SUITE 304 |
| 350 N. NINTH STREET |
| BOISE, ID 83702 |
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