Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/19/1993
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Application #:
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07854037
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Filing Dt:
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03/19/1992
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Inventors:
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TOSHIO OTAKI, HITOSHI IKEDA, MASATO YAMADA, TAKAO TAKENAKA
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Title:
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ROTATING FURNACE TUBE HAVING A NON-ROTATING SLIDABLE WORK HOLDER FOR PROCESSING SEMICONDUCTOR SUBSTRATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| 4-2, MARUNOUCHI 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| NIKAIDO, MARMELSTEIN, MURRAY & ORAM |
| CHARLES M. MARMELSTEIN |
| SUITE 1000, 1725 K ST., NW |
| WASHINGTON, DC 20006 |
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