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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	5271788	Issue Dt:	12/21/1993	Application #:	07917361	Filing Dt:	07/23/1992
Inventors:	MAKOTO HASEGAWA, TAKAYA MATSUSHITA, KEIJI HORIOKA, ISAHIRO HASEGAWA, TOSHIHISA NOZAWA et al
Title:	PLASMA PROCESSING APPARATUS

Assignment: 1

Reel/Frame:

006364/0300

Recorded: 12/22/1992

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST.

Assignors:

HASEGAWA, MAKOTO

Exec Dt:

09/14/1992

MATSUSHITA, TAKAYA

Exec Dt:

09/14/1992

HORIOKA, KEIJI

Exec Dt:

09/14/1992

HASEGAWA, ISAHIRO

Exec Dt:

09/14/1992

NOZAWA, TOSHIHISA

Exec Dt:

08/28/1992

ISHIKAWA, YOSHIO

Exec Dt:

09/08/1992

HIRATSUKA, MASAHITO

Exec Dt:

09/02/1992

KANEKO, SATOSHI

Exec Dt:

08/25/1992

Assignees:

TOKYO ELECTRON LIMITED

2-3-1, NISHI-SHINJUKU, SHINJUKU-KU

TOKYO, JAPAN

KABUSHIKI KAISHA TOSHIBA

72 HORIKAWA-CHO, SAIWAI-KU

KAWASAKI-SHI, JAPAN

Correspondent:

MARVIN J. SPIVAK

OBLON, SPIVAK, MCCLELLAND, MAIER &

NEUSTADT

1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR

ARLINGTON, VA 22202

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