Patent Assignment Abstract of Title
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For pending or abandoned applications please consult USPTO staff.
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/08/1994
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Application #:
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07930590
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Filing Dt:
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08/14/1992
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Inventors:
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CHIN-CHI TSAI, HALSEY H. HASELTON
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Title:
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COUPLED MICROWAVE ECR AND RADIO-FREQUENCY PLASMA SOURCE FOR PLASMA PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| SCARBORO & BEAR CREEK RD. |
| P.O. BOX 2009 |
| OAK RIDGE, TENNESSEE 37831-8014 |
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| MARTIN MARIETTA ENERGY SYSTEMS, INC. |
| ATTN: J. M. SPICER |
| P.O. BOX 2009 |
| OAK RIDGE, TN 37831-8243 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| GC-62 (FORSTL) MS 6F-067 |
| 1000 INDEPENDENCE AVENUE, S.W. |
| WASHINGTON, DISTRICT OF COLUMBIA 20585 |
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| UNITED STATES DEPARTMENT OF ENERGY |
| BETTY A. WINCHESTER |
| 1000 INDEPENDENCE AVE., SW |
| GC-62 (FORSTL) MS 6F-67 |
| WASHINGTON, DC 20585 |
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