Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/03/1994
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Application #:
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07995727
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Filing Dt:
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12/23/1992
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Inventors:
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JAMES A. O'NEILL, MICHAEL L. PASSOW, JYOTHI SINGH
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Title:
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METHOD AND APPARATUS FOR OPTICAL EMISSION END POINT DETECTION IN PLASMA ETCHING PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST.
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| HAROLD HUBERFELD |
| IBM CORPORATION |
| DEPT. 34H/BLDG. 300-482 |
| 1580 ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533-6531 |
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