Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/10/1994
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Application #:
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07807162
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Filing Dt:
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12/13/1991
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Inventors:
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ROBERT G. BEGIN, PETER J. CLARKE
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Title:
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METHOD FOR PROCESSING SEMI-CONDUCTOR WAFERS IN A MULTIPLE VACUUM AND NON-VACUUM CHAMBER APPARATUS
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Assignment:
1
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5855 TOPANGA CANYON BLVD. |
WOODLAND HILLS, CALIFORNIA 91367 |
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CSC NETWORKS/PRENTICE HALL |
AMY LEE BRADY |
500 CENTRAL AVE. |
ALBAN, NY 12206 |
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Assignment:
2
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355 SOUTH GRAND AVENUE |
LOS ANGELES, CALIFORNIA 90071 |
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BROBECK, PHLEGER & HARRISON LLP |
ATTN: TIFFANY EPSTEIN |
550 SOUTH HOPE STREET |
LOS ANGELES, CA 90071 |
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