Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/21/1994
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Application #:
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07952281
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Filing Dt:
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09/28/1992
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Inventors:
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YOSHITERU FUKUTOMI, MASAMI OHTANI, YASUSHI NAKAMURA
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Title:
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SUBSTRATE HOLDING APPARATUS OF A SIMPLE STRUCTURE FOR HOLDING A ROTATING SUBSTRATE, AND A SUBSTRATE PROCESSING APPARATUS INCLUDING THE SUBSTRATE HOLDING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1 TENJINKITAMACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU |
| A CORP. OF JAPAN |
| KYOTO 602, JAPAN |
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| OSTROLENK, FABER, GERB & SOFFEN |
| JAMES A. FINDER |
| 1180 AVENUE OF THE AMERICAS |
| NEW YORK, NY 10036-8403 |
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