Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/21/1994
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Application #:
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08107027
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Filing Dt:
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08/16/1993
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Inventor:
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CHISHIO KOSHIMIZU
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Title:
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PLASMA-PROCESS SYSTEM WITH IMPROVED END-POINT DETECTING SCHEME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3-1, NISHI-SHINJUKU-KU |
| TOKYO, JAPAN |
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| GREGORY J. MAIER |
| OBLON, SPIVAK, MCCLELLAND, MAIER |
| & NEUSTADT, P.C. |
| 1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR |
| ARLINGTON, VA 22202 |
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