Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/23/1994
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Application #:
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07857832
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Filing Dt:
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03/26/1992
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Inventors:
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TETSU OOSAWA, TERUO ASAKAWA, KENJI NEBUKA, HIROO ONO
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Title:
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LOAD-LOCK UNIT AND WAFER TRANSFER SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3-1, NISHI-SHINJUKU SHINJUKU-KU, TOKYO, JAPAN |
| JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & |
| NEUSTADT, P.C. |
| JAMES D. HAMILTON |
| 1755 JEFFERSON DAVIS HIGHWAY, 4TH FL |
| ARLINGTON, VA 22202 |
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