Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/13/1994
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Application #:
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08093445
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Filing Dt:
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07/19/1993
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Inventors:
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JOEL M. COOK, JOHN R. TROW
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Title:
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MAGNETIC FIELD ENHANCED PLASMA PROCESSING CHAMBER
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Assignment:
1
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| 120 SOUTH LASALLE STREET |
| CHICAGO, ILLINOIS 60603 |
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| ARTER & HADDEN LLP |
| SUSAN L. MIZER |
| 1100 HUNTINGTON BUILDING |
| 925 EUCLID AVENUE |
| CLEVELAND, OH 44115 |
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