Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/04/1994
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Application #:
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08136947
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Filing Dt:
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10/18/1993
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Inventors:
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YASUSHI GOTOH, TOKUO KURE, HIROSHI KAWAKAMI, MASANORI KATSUYAMA, KIYOMI YAGI et al
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Title:
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ETCHING METHOD AND ETCHING APPARATUS THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME CHIYODA-KU, TOKYO, JAPAN |
| JAPAN |
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| THOMAS E. BEALL, JR. |
| FAY, SHARPE, BEALL, FAGAN, MINNICH ET AL |
| 104 EAST HUME AVENUE |
| ALEXANDRIA, VA 22301 |
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