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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/11/1994
Application #:
08135715
Filing Dt:
10/13/1993
Inventors:
ERNEST L. CHEUNG, PATTY H. TSAI
Title:
ETCHING MOSI2 USING SF6, HBR AND O2
Assignment: 1
Reel/Frame:
006846/0454Recorded: 12/16/1993Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/13/1993
Exec Dt:
10/13/1993
Assignee:
3050 BOWERS AVE.
SANTA CLARA, CALIFORNIA 95054
Correspondent:
PETER J. SGARBOSSA
PATENT COUNSEL-MAIL STOP #0934
APPLIED MATERIALS, INC.
3050 BOWERS AVE.
SANTA CLARA, CA 95054

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